대한전자공학회:학술대회논문집 (Proceedings of the IEEK Conference)
- 대한전자공학회 1998년도 하계종합학술대회논문집
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- Pages.391-394
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- 1998
ZnO:Al 투명도전막의 열처리특성에 대한 연구
A study on the heat treatment effects of ZnO:Al transparent conductive thin films
초록
The effect of the heat treatment of the AZO transparent conductive film prepared by rf magnetron sputtering was investigated. The variations of the electrical and optical properties with heat treatment ambient and temperature were studied. After the heat treatment in air above 300.deg. C, the resistivity of AZO films increased by 1 to 8 orders of magnitude. However, no significant change in the AZO films after th eheat treatment in vacuum was not observed.
키워드