Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 2003.12a
  • /
  • Pages.218-218
  • /
  • 2003
  • /
  • 2233-9485(pISSN)
  • /
  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
권호 표지

Etch characteristics of CoZrNb and CoFeTb magnetic films in a high density plasma

  • Chung, Chee-Won (Department of Chemical Engineering, Inha University) ;
  • Song, Young-Soo (Department of Chemical Engineering, Inha University) ;
  • Shin, Byul (Department of Chemical Engineering, Inha University) ;
  • Park, Sang-Jin (Materials and Devices Lab, Samsung Advanced Institute of Technology) ;
  • Kim, Tae-Wan (Materials and Devices Lab, Samsung Advanced Institute of Technology)
  • Published : 2003.12.01
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Abstract

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