Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
권호 표지

Microcrystalline Silicon Thin-film(${\mu}c$-Si:H) and Solar Cells prepared at Low Temperature by 60MHz PECVD

60MHz PECVD법에 의한 ${\mu}c$-Si:H 박막의 저온증착 및 태양전지 응용

  • 이정철 (한국에너지기술연구원 태양광연구센터) ;
  • 정연식 (한국에너지기술연구원 태양광연구센터) ;
  • 김석기 (한국에너지기술연구원 태양광연구센터) ;
  • 윤경훈 (한국에너지기술연구원 태양광연구센터) ;
  • 송진수 (한국에너지기술연구원 태양광연구센터) ;
  • 박이준 (한국에너지기술연구원 태양광연구센터) ;
  • 권성원 (한국과학기술원) ;
  • 임광수 (한국과학기술원)
  • Published : 2003.07.21
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents the deposition of ${\mu}c$-Si:H thin-film and fabrication of a solar cell by VHF-PECVD method. The ${\mu}c$-Si:H thin films and pin-type solar cells are fabricated using multi-chamber cluster tool system. A 7.4% conversion efficiency was achieved from ${\mu}c$-Si:H thin film solar cells with total thickness less than $5{\mu}m$. The physical characteristic was measured by Raman spectroscopy, Solar cell characteristic was measured under AM1.5 illumination.

Keywords