Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.07c
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- Pages.1526-1528
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- 2003
Dielectric Characteristics of $SiO_2/Si_3N_4$ Double Layer
$SiO_2/Si_3N_4$ 2중층 박막의 유전특성
- Ko, K.Y. (Kwang woon University) ;
- Kim, G.S (Kwang woon University) ;
- Hong, N.P. (Kwang woon University) ;
- Byun, D.G. (Kwang woon University) ;
- Lee, C.H. (Chung ju University) ;
- Hong, J.W. (Kwang woon University)
- Published : 2003.07.21
Abstract
본 연구에서는 P-type Si wafer에 1000[
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