Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)
- 2003.11a
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- Pages.221-225
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- 2003
Preparation of Field Effect Transistor with $(Bi,La)Ti_3O_{12}$ Ferroelectric Thin Film Gate
$(Bi,La)Ti_3O_{12}$ 강유전체 박막 게이트를 갖는 전계효과 트랜지스터 소자의 제작
- Suh Kang Mo (Electronics and Computer Engineering, Dankook University) ;
- Park Ji Ho (Electronics and Computer Engineering, Dankook University) ;
- Gong Su Cheol (Electronics and Computer Engineering, Dankook University) ;
- Chang Ho Jung (Electronics and Computer Engineering, Dankook University) ;
- Chang Young Chul (School of Mechatronics Engineering, Korea University of Technology and Education) ;
- Shim Sun Il (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology) ;
- Kim Yong Tae (Semiconductor Materials and Devices Lab, Korea Institute of Science and Technology)
- 서강모 (단국대학교 전자컴퓨터공학과) ;
- 박지호 (단국대학교 전자컴퓨터공학과) ;
- 공수철 (단국대학교 전자컴퓨터공학과) ;
- 장호정 (단국대학교 전자컴퓨터공학과) ;
- 장영철 (한국기술교육대학교 메카트로닉스공학부) ;
- 심선일 (한국과학기술연구원 반도체소자연구실) ;
- 김용태 (한국과학기술연구원 반도체소자연구실)
- Published : 2003.11.01
Abstract
The MFIS-FET(Field Effect Transistor) devices using
Keywords