Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2002.10a
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- Pages.117.2-117
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- 2002
Study on the Formation of Silicon Carbide Thin Film using Polycarbosilane
폴리카보실란을 이용한 SiC 박막제조 및 특성분석
- Published : 2002.10.18
Abstract
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