Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2002.10a
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- Pages.115.2-115
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- 2002
Chemical Vapor Deposition of Low Temperature Poly Si Thin Film by Hot Filament Method
열 필라멘트법에 의한 저온 다결정 실리콘 박막의 화학기상증착
- Published : 2002.10.18
Abstract
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