Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2002.10a
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- Pages.114.2-114
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- 2002
Investigation of the Nano-structural and Optical Features of nc-Si Films Grown by RF Magnetron Sputter Techniques
RF 마그네트론 스퍼터 기법에 의해 제조된 nc-Si의 나노구조 및 광학적 특성
- Published : 2002.10.18
Abstract
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