Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2002.10a
- /
- Pages.42.1-42
- /
- 2002
Properties of ITO Thin Films Deposited by RF Magnetron Sputtering at Low Temperature
RF Magnetron Sputtering을 이용하여 저온에서 증착한 ITO 박막의 특성
- Published : 2002.10.18
Abstract
Keywords