Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2002.05a
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- Pages.310-316
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- 2002
미끄럼운동 시 TiN코팅에 형성되는 산화막이 마찰 및 마멸 특성에 미치는 영향
- Published : 2002.05.16
Abstract
In this study, the effects of oxide layer formed on the wear tracks of TiN coated silicon wafer on friction and wear characteristics were investigated. Silicon wafer was used for the substrate of coated disk specimens, which were prepared by depositing TiN coating with
Keywords
- oxide layer;
- TiN coated silicon wafer;
- sliding test;
- X-ray diffraction analysis;
- Auger electron analysis;
- frictional force image