한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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- Pages.165-166
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- 2002
The preparation of ultra hard nitrogenated DLC film by $N_2^+$ implantation
- Olofinjana, A.O. (Department of Physics Universiti Brunei Darussalam) ;
- Chen, Z. (School of Mechanical, Manufacturing & Medical Engineering Queensland University of Technology) ;
- Bell, J.M. (School of Mechanical, Manufacturing & Medical Engineering Queensland University of Technology)
- 발행 : 2002.10.21
초록
Hydrogen free diamond like carbon (DLC) films were prepared on steel substrates by using a single ion beam in a configuration that allowed sputtering of a graphite target and at the same time allowed to impact the substrate at a grazing angle. The DLC films so prepared have improved properties with increased disorder and with modest hardness that is slightly higher than previously reported values. We have studied the effects of