Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference (한국윤활학회:학술대회논문집)
- 2002.10b
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- Pages.159-160
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- 2002
Effect of Humidity on Tribological Behavior of Si-DLC/DLC Multi-layer
- Yi, J.W. (Surf.Engin.Dept, Korea Institute of Machinery and Materials, School of Mechanical Engineering, Kyungpook National University) ;
- Kim, J.K. (Surf.Engin.Dept, Korea Institute of Machinery and Materials) ;
- Kim, S.S. (School of Mechanical Engineering, Kyungpook National University) ;
- Kim, D.G. (Surf.Engin.Dept, Korea Institute of Machinery and Materials)
- Published : 2002.10.21
Abstract
To investigate the humidity effect on tribological behaviors of Si-DLC/DLC multi-layers, the samples were prepared using a system consisted of an ion-gun for deposition DLC films and a balanced magnetron sputter for introducing silicon atoms to Si-DLC films. The Si-DLC/DLC multi-layers were composed of pure DLC films and Si-incorporated DLC films alternatively and had different bilayer numbers. Hardness and residual stress were drastically decreased through the formation of Si-DLC/DLC multi-layers compared to those of the pure and Si-incorporated DLC films. Wear results obtained under the various humidity conditions (<10%,