한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)

한국트라이볼로지학회 (Korean Tribology Society)
권호 표지

Effect of Humidity on Tribological Behavior of Si-DLC/DLC Multi-layer

  • Yi, J.W. (Surf.Engin.Dept, Korea Institute of Machinery and Materials, School of Mechanical Engineering, Kyungpook National University) ;
  • Kim, J.K. (Surf.Engin.Dept, Korea Institute of Machinery and Materials) ;
  • Kim, S.S. (School of Mechanical Engineering, Kyungpook National University) ;
  • Kim, D.G. (Surf.Engin.Dept, Korea Institute of Machinery and Materials)
  • 발행 : 2002.10.21
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초록

To investigate the humidity effect on tribological behaviors of Si-DLC/DLC multi-layers, the samples were prepared using a system consisted of an ion-gun for deposition DLC films and a balanced magnetron sputter for introducing silicon atoms to Si-DLC films. The Si-DLC/DLC multi-layers were composed of pure DLC films and Si-incorporated DLC films alternatively and had different bilayer numbers. Hardness and residual stress were drastically decreased through the formation of Si-DLC/DLC multi-layers compared to those of the pure and Si-incorporated DLC films. Wear results obtained under the various humidity conditions (<10%, $40{\sim}50%$, and >85%) showed that the pure DLC film was largely depended on the humidity while the Si-DLC and the Si-DLC/DLC multi-layers were little affected by the environmental humidity. Although friction coefficients of all samples were increased with the relative humidity, the multi-layer films showed relatively lower friction coefficients that those of the single films.

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