Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Nanometer-Size Writing using 200 keV Electron Beam Lithography

  • Choi, Seong-S. (Department of Physics, Sun Moon University) ;
  • Carcenac, F. (LAAS/CNRS) ;
  • Viue, C. (LAAS/CNRS)
  • Published : 2002.02.19
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