Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
- /
- Pages.172-172
- /
- 2002
The electron cyclotron resonance (ECR) at various conditions in the inductively coupled Plasma(ICP)
- Jeong, Jin-Uk (PLASMART R&D Center) ;
- Kim, Seong-Sik ;
- Lee, Sang-Won ;
- Jang, Hong-Yeong
- Published : 2002.02.19
Abstract
Keywords