Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
- /
- Pages.169-169
- /
- 2002
Langmuir probe & Mass analysis in $N_2$ , $O_2$ , $CF_4$ / inert gas (He,Ar,Xe) mixture discharges.
- Published : 2002.02.19
Abstract
Keywords