Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Structures and Properties of hard Multilayered TiN/BON Thin Films Prepared by PAMOCVD Method

  • Lim, D.C. (Department of Chemistry, Sungkyunkwan University) ;
  • Chen, G.C. (Department of Chemistry, Sungkyunkwan University) ;
  • Lee, S.B. (Department of Chemistry, Sungkyunkwan University) ;
  • Boo, J.H. (Department of Chemistry, Sungkyunkwan University)
  • Published : 2002.02.19
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