Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.162-163
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- 2002
Simulation of neutral beam etching for material processing
- Chung, T.R. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Kim, S.J. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Park, H.S. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Lee, J.K. (Department of Electrical Engineering, Pohang University of Science and Technology) ;
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Yeom, G.Y.
(Department of Materials Engineering Sungkyunkwan University)
- Published : 2002.02.19
Abstract
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