Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.111-112
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- 2002
The influence of LT-GaN buffer layer on the residual stress of GaN film using AlN buffer layer on Si(111) substrate
- Jung, Sung-Hoon (Department of Materials Engineering, SungKyunKwan University) ;
- Lee, Jeong-Wook (Department of Materials Engineering, SungKyunKwan University) ;
- Lee, In-Hwan (Photonics Laboratory, Samsung Advanced Institute of Technology) ;
- Lee, Sang-Hak (Department of Materials Engineering, SungKyunKwan University) ;
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Yoo, Ji-Beom
(Department of Materials Engineering, SungKyunKwan University)
- Published : 2002.02.19
Abstract
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