Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.02a
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- Pages.84-84
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- 2002
Adsorption and Decomposition of Dimethylisopropylsilane on Si(111) Surface
- Jee, H.G. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Yang, T.S. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Cho, S.J. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
- Kim, S.K. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University) ;
-
Boo, J.H.
(Institute of Basic Science and Department of Chemistry, Sungkyunkwan University)
;
- Lee, S.B. (Institute of Basic Science and Department of Chemistry, Sungkyunkwan University)
- Published : 2002.02.19
Abstract
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