Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2002.06a
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- Pages.187-187
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- 2002
SIMS Round Robin Test(RRT) for the Quantitative Analysis of Boron in Si.
- Kim, Kyung-Joong (Nano Surface Group, Korea Research Institute of Standards and Science) ;
- Moon, Dae-Won (Nano Surface Group, Korea Research Institute of Standards and Science)
- Published : 2002.06.27
Abstract
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