한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2002년도 제23회 학술발표회 초록집
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- Pages.105-105
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- 2002
Fabrication of NSOM Cantilever using Wet isotropic Etching
- Choi, Seong-S (Department of Nanoscience, SunMoon University) ;
- Jung, M.Y. (Department of Nanoscience, SunMoon University) ;
- Park, S.M. (Department of Nanoscience, SunMoon University) ;
- Kim, Jong-Woo (Department of Vacuum Science, Sungkyunkwan University) ;
- Boo, J.H. (Department of Vacuum Science, Sungkyunkwan University)
- 발행 : 2002.06.27