Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
- /
- Pages.460-463
- /
- 2002
Gas Sensing Characteristics and Doping Effect of $MoO_3$ Thin Films prepared by RF magnetron sputtering
RF magnetron sputtering법으로 제조한 $MoO_3$ 박막의 가스 감지 특성 및 첨가물의 영향
- Hwang, Jong-Taek (Chungbuk national University) ;
- Jang, Gun-Eik (Chungbuk national University)
- Published : 2002.11.07
Abstract