Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
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- Pages.411-415
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- 2002
Electrical properties of NiCr thin films deposited by rf magnetron sputtering
RF magnetron sputtering 방법으로 제작한 NiCr 박막의 전기적특성
- Kim, Dae-Yeon (School of Materials Science and Engineering, University of Ulsan) ;
- Kwon, Jeong-Ho (School of Materials Science and Engineering, University of Ulsan) ;
- Jeong, Yeon-Hak (School of Materials Science and Engineering, University of Ulsan) ;
- Lee, Jae-Shin (School of Materials Science and Engineering, University of Ulsan)
- Published : 2002.11.07
Abstract
Precision resistors were prepared by controlling the concentration of Ni and Cr deposited on cylindrical alumina substrates (diameter: 1.7mm, length: 5.5mm). Deposited films were analyzed with FESEM, AES, and AFM. As the amount of Cr in the film increases, the TCR was shifted to negative direction.