한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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- Pages.383-386
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- 2002
유한요소법을 이용한 버클링 마이크로 밸브의 유동특성 해석 및 최적 설계
Analysis of Flow Characteristics and Optimum Design of a Buckling Microvalve Using the Finite Element Method
- Kim, Jae-Min (Dongseo Univ.) ;
- Lee, Jong-Choon (Kyungnam information College) ;
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Chung, Gwiy-Sang
(Dongseo Univ.) ;
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Yoon, Suk-Jin
(Korea Institute of Science and Technology)
- 발행 : 2002.11.07
초록
This paper reports on the fluid flow simulation results of an active microvalve. The mechanical and fluidic analysis are done by finite element method. The designed structure is normally closed microvalve using buckling effect, which is consist of three separate structures; a valve seat die, an actuator die and a small piezoelectric actuator. It is confirmed that the complete laminar flow and the lowest flow leakage are strongly depend on the valve seat geometry. In addition, turbulent flow was occurs in valve outlet according to increase seat dimension, height and inlet pressure. From this, we was deducts the optimum geometry of the valve seat and diaphragm deflection that have an great influence fluid flow in microvalve. Thus, it is expected that our simulation results would be apply for constructing integrated chemical analyzing system or drug delivery system.