Fabrication of NdBaCuO Superconducting Thin Film

NdBaCuO 초전도박막 합성

  • 이상헌 (선문대학교 전자정보통신공학부) ;
  • 이상근 (산업자원부 기술표준원)
  • Published : 2002.11.07

Abstract

NdBaCuO thin films were prepared on $SrTiO_{3}$ substrates by RF magnetron sputtering. These as-grown films were classified into 3type. The resistivity of the deposited films are usually lower than of the YBCO film. The Tc (onset) and Tc (R=0) in the optimized thin films are as high as 90 and 80K, respectively. These as-grown films are highly uniform and semi-trans parent and have a room temperature resistivity of $0.3m{\Omega}cm$.

Keywords