한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

BST 박막 표면의 프랙탈 분석 및 3D 이미지 특성

A Study on Fractal Analysis and 3D Images of Surface on BST Thin Films.

  • 홍경진 (광주대학교 컴퓨터전자통신공학부) ;
  • 민용기 (광주대학교 컴퓨터전자통신공학부) ;
  • 조재철 (초당대학교 전자공학과)
  • 발행 : 2002.05.17
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초록

The applicability of models based on fractal morphology to characterize $(Ba\;Sr)TiO_{3}$ thin film surfaces was investigated. The fractal morphology of coated barium strontium titan oxide thin film surfaces was described using fractal dimension from scanning electro microscopy image. The $(Ba\;Sr)TiO_{3}$ coating were deposited on silicon wafers using $(Ba\;Sr)TiO_{3}$ solution and spin coater. BST solution was composited by mol ratio, and then spin-coated from 3 times to 5 times coating on $Pt/SiO_{2}/Si$ substrate. Qualitative thin film analysis was performed with scanning electro microscopy (SEM), and surfaces parameters such as average grain diameter, roughness exponent and fractal dimension were determined.

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