Thin Film Thermal Sensor using Amorphous Chalcogenide Semiconductor

비정질 칼코게나이드 반도체를 이용한 박막온도센서

  • 문형돈 (수원대학교 전자재료공학과) ;
  • 임동준 (수원대학교 전자재료공학과) ;
  • 김화영 (수원대학교 전자재료공학과) ;
  • 소동석 (수원대학교 전자재료공학과) ;
  • 이진민 (수원대학교 전자재료공학과) ;
  • 조봉희 (수원대학교 전기공학과) ;
  • 김영호 (수원대학교 전자재료공학과)
  • Published : 2002.07.08


Chalcogenide glassy semiconductors(CGS) can be obtained by the melt quenching technique. We have investigated the thin film heterostructures : metal-chalcogenide glassy semiconductors, where metal is copper, and chalcogenide glassy semiconductors are glasses of the system As-Se. Cu/CGS film heterostructure were produced in the vacuum evaporator by the method of vacuum thermal evaporation. Doped films are very sensitive to external actions, and this property allows developing supersensitive precision sensors of temperature, humidity, illumination, and etc. based on them. Cu/CGS film has shown that resistance strongly depend on the temperature. The slop of temperature and resistance shows linear.