한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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- Pages.609-612
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- 2002
$Ar/O_2$ 비에 따른 (Ba, Sr)(Nb, Ti)$O_3$ [BSNT] 박막의 구조적 특성
The structural properties of the (Ba,Sr)(Nb,Ti)$O_3$ [BSNT] thin films with $Ar/O_2$ rates
초록
In this study, the electrical properties were investigated for the deposited Ba,Sr)(Nb,Ti)