Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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The fabrication of rf termination power resistor

고주파용 Termination 파워저항의 제작

  • 류제천 ((주) 케이엠씨 테크놀러지) ;
  • 김동진 ((주) 케이엠씨 테크놀러지) ;
  • 강병돈 ((주) 케이엠씨 테크놀러지) ;
  • 구본급 (국립한밭대학교 재료공학과) ;
  • 강전홍 (한국표준과학연구원 전기.자기그룹) ;
  • 유광민 (한국표준과학연구원 전기.자기그룹) ;
  • 유권상 (한국표준과학연구원 전기.자기그룹)
  • Published : 2002.07.08
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Abstract

We were fabricated of rf power resisotor on AlN substrates by thick film process. The characteristics of capacitance and microwave are measured by digital LCR meter and Network analyzer(HP8532D). The results are shown that capacitances are slight greater and microwave characteristics are good values.

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