한국전산유체공학회:학술대회논문집

Korean Society of Computational Fluids Engineering (한국전산유체공학회)
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Computational Analysis of Air Flow in a Spinner for Drying LCD Glass Panel

LCD 기판 세정건조용 스피너 설계를 위한 내부유동 해석

  • 곽호상 (금오공과대학교 기계공학부) ;
  • 이상우 (금오공과대학교 기계공학부) ;
  • 이상현 (금오공과대학교 기계공학과 대학원) ;
  • 김용범 ((주)탑엔지니어링)
  • Published : 2002.10.01
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Abstract

A numerical model is employed for design of a spinner device to dry the 5-th generation LCD glass panel. The turbulent flow in a spinner is driven by rotation of a large disk and suction by the exhaust system connected to vacuum chamber, which is simulated by using the FLUENT package. Based on numerical simulation, the required capacity of exhaust system is assessed. The effects of the presence of cover on the flow characteristics are examined. A computational trouble shooting is attempted to resolve the problem of panel rising which occurred in real experiments.

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