A study on effect of electron beam irradiation in the oxidized poly-Sil-xGex films
- Kang, Han-Byul (School of Metallurgical and Materials Eng., Sungkyunkwan University) ;
- Lee, Jun-Ho (School of Metallurgical and Materials Eng., Sungkyunkwan University) ;
- Yang, Cheol-Woong (School of Metallurgical and Materials Eng., Sungkyunkwan University)
- Published : 2002.11.01
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