Proceedings of the Korean Society Of Semiconductor Equipment Technology (한국반도체및디스플레이장비학회:학술대회논문집)
- 2002.11a
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- Pages.94-96
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- 2002
Vibration Reduction of Spin Etcher
- Rim, Kyung-Hwa (Dept. of Control System Engineering, Korea University of Technology and Education) ;
- Lww, Eun-Kyung (Dept. of Control System Engineering, Korea University of Technology and Education) ;
- Cho, Jung-Keun (DNS Korea)
- Published : 2002.11.01
Abstract
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