한국반도체및디스플레이장비학회:학술대회논문집 (Proceedings of the Korean Society Of Semiconductor Equipment Technology)
- 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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- Pages.72-74
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- 2002
Electrical properties and thermal stability of Al/$WN_x$ /Ti submicron contact structure
- Kim, Yong-Tae (Div. System Engineering, Semiconductor Devices Laboratory, Korea Institute of Science and Technology) ;
- Sim, Hyun-Sang (Div. System Engineering, Semiconductor Devices Laboratory, Korea Institute of Science and Technology) ;
- Kim, Seong-Il (Div. System Engineering, Semiconductor Devices Laboratory, Korea Institute of Science and Technology)
- 발행 : 2002.11.01
초록
A submicron contact scheme using
키워드