Proceedings of the Korean Magnestics Society Conference (한국자기학회:학술대회 개요집)

  • 2002.12a
  • /
  • Pages.140-141
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  • 2002
  • /
  • 2233-9485(pISSN)
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  • 2233-9574(eISSN)
The Korean Magnetics Society (한국자기학회)
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Fabrication Condition Effects on the Magnetostrictive Properties of Sputtered Tb-Fe Thin Films

  • Na, S.M. (Sungkyunkwan Univ., Dept. of Advanced Materials Eng.) ;
  • Suh, S.J. (Sungkyunkwan Univ., Dept. of Advanced Materials Eng) ;
  • Lim, S.H. (Korea Institute of Science and Technology, Future Technology Research Division)
  • Published : 2002.12.01
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Abstract

In proto-type microactuators driven by magnetostrictive Tb-Fe thin films, the deflection was observed to be much smaller than that expected from large-sized "standard" Tb-Fe thin films. A striking difference was observed when the results from a thin substrate of 28 $\mu\textrm{m}$ for microactuator applications were compared with those from a standard substrate. At a standard substrate thickness (several hundred $\mu\textrm{m}$), an amorphous phase was formed and the coercivity was low being 80 Oe. (omitted)

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