Fan Filter Unit 소음ㆍ진동 특성과 청정실에 미치는 영향성 평가에 관한 연구

A Study on the noise ＆ vibration properities of Fan Filter Unit and evaluation of effect to Clean Room

FFU are used increasingly by the microeleceronics industry to provide clean recirculating air for the fabrication of integrated circuits and laminar flow air. There may be several hundred ffu in a large cleanroom, covering 100% of the ceiling area. Hence, there is of often knowledge in the inside and outside of the country the flu give rise to noise & vibration trouble to microelectronics industry. Noise ＆ Vibration control for satisfication about noise ＆ vibration criteria in TFT-LCD factory cleanroom be in need of exact noise & vibration data of accurence from utility & equipment that can be exert a bad influence upon cleanroom. In this pater, hence we found out noise and vibration properities of ffu by using experimental method. And, we performed noise ＆ vibration analysis about noise it vibration level in cleanroom using semiempirical method for quantative approach about noise ＆ vibration level in cleanroom.