Transient oscilaltion analysis for MEMS resonant accelerometer

In principle, a resonance type sensor generally has an oscillation characteristic. Thus, an analysis on transient oscillation response takes a great interest since it is related to the performance of resonant sensor. In particular, system bandwidth has tradeoff with oscillation accuracy, i.e. quality factor. For an efficient analysis of the oscillation characteristic, several analytic methods are introduced and summarized. The results are fundamentally based on the classical describing function method, but can explain the transient oscillation by introducing time varying concept about the predicted limit cycle. After introducing those methods, the application results to the specified system...