Adaptive Control for the Conventional Mode of Operation of MEMS Gyroscopes

This paper presents adaptive add-on control algorithms for theconventional mode of operation of MEMS z-axis gyroscopes. This scheme is realized by adding an outer loop to a conventional force-balancing scheme that includes a parameter estimation algorithm. The parameter adaptation algorithm estimates the angular rate, identifies and compensates the quadrature error, and may permit on-line automatic mode tuning. The convergence and resolution analysis show that the proposed adaptive add-on control scheme prevents the angular rate estimate from being contaminated by the quadrature error, while keeping ideal resolution performance of a conventional force-balancing scheme.