한국유변학회:학술대회논문집 (Proceedings of the Korean Society of Rheology Conference)
- 한국유변학회 2002년도 추계학술발표회 논문집
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- Pages.59-62
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- 2002
나노임프린트리소그래피의 엠보싱 과정에서의 흐름거동
Flow behavior at the embossing stage of nanoimprint lithography
- Jeong, Jun-Ho (Korea Institute of achinery and materials, Department of Intelligent Precision Machine) ;
- Park, Yun-Suk (KyungWon Tech Corporation) ;
- Shin, Yung-Jae (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
- Lee, Jae-Jong (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
- Park, Kyoung-Taik (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
- Lee, Eung-Sug (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine) ;
- Lee, Sang-Rok (Korea Institute of Machinery and materials, Department of Intelligent Precision Machine)
- 발행 : 2002.11.01