Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.182-182
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- 2002
Microstructure and fracture characteristic of Ti-based ceramic thin films deposited by R.F. sputtering process
R.F. sputtering법에 의해 제조된 Ti기 세라믹 박막의 미세조직 및 파괴특성
Abstract
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