Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.107-107
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- 2002
Characteristics of Zirconium based Glass materials thin films for gate dielectric applications
Zirconium과 Glass Materials 의 gate oxide용 복합금속산화물의 특성평가
Abstract
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