Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.11a
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- Pages.61-61
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- 2002
Properties Of high-k $ZrO_2$ films grown by MOMBE
MOMBE로 성장시킨 고유전 $ZrO_2$ 박막의 특성
Abstract
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