한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2002년도 추계학술대회 논문집
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- Pages.387-390
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- 2002
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- 2005-8446(pISSN)
삼차원 좌표 측정을 위한 부피 간섭계의 오차분석 및 성능평가
Error analysis and Performance test of the Volumetric interferometer for Absolute distance measurement
초록
In this paper, we accomplish uncertainty evaluation and performance test of the volumetric interferometer using two spherical wavefronts emitted from the ends of two single mode fibers. We verify that the volumetric interferometer has the volume uncertainty of 690nm through the error analysis and it has the resolution of 0.1
키워드