재질 변화에 따른 초정밀가공기용 마이크로 스테이지의 안정성 해석

Stability Analysis according to Material Alteration on Micro Stage for Micro Cutting Machine

In this paper, stability of ultra precisio unit is analyzed, this unit is the kernel unit precision processing machine. According alteration of shape and material about stability investigation is performed. Through this stability investigation, trial is reduced in design and manufacture, at the time, we are accumulated foundation data for control.