Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)
- 2002.06b
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- Pages.21-24
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- 2002
Thermal Analysis of Gas Sensor Array
가스센서 어레이 열해석
Abstract
A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.
Keywords