Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
- /
- Pages.140-140
- /
- 2002
Electrical Properties of Cobalt Silicide Deposited on Poly-Si/$SiO_2$ /Si Substrates
Poly-Si/$SiO_2$ /Si 기판위에 증착된 코발트실리사이드의 전기적 특성
Abstract
Keywords