Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
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- Pages.67-67
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- 2002
Characterization of multilayer thin film by Nanoindentation and Scaning Probe Microscope
나노인덴테이션과 주사탐침현미경을 이용한 다층박막의 특성평가
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