Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
- /
- Pages.62-62
- /
- 2002
The analysis of stresses in Ru thin films and suppression of grain growth of Ru with oxygen flow rate control
Ru 박막의 응력 거동 분석 및 산소 유량 조절을 통한 결정립 성장 억제
Abstract
Keywords