한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 2002년도 춘계학술대회 논문집
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- Pages.429-434
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- 2002
미세 변위제어를 위한 공압 액추에이터 개발
Development of a pneumatic actuator for Micro-Positioning control
초록
In order to improve the accuracy in the field of simiconductor and LCD research equipment, the demand of XYZ stage which is possible to control X axis, Y axis and Z axis has been increased steadly in place of the existing XY stage which is only practicable to X & Y axis positioning control. This paper presents a new pneumatic actuator for Micro-positioning control in the XYZ stage. Air pressure in a pneumatic actuator is controlled by the E/P Regulator. The control range of pneumatic actuator is about 100 micro-meters and it's construction concept is easy to apply a practical state