Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.07a
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- Pages.301-304
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- 2002
Characterization of 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$ )$O_3$ Thin Films Grown by RF Magnetron Sputtering Method
RF 마그네트론 스퍼터링법으로 성장시킨 0.5 % Ce-doped Ba($Zr_{0.2}Ti_{0.8}$ )$O_3$ (BCZT) 박막의 특성분석
Abstract
We investigated the structural and electrical properties of Ce-doped Ba(
Keywords
- RF magnetron sputtering;
- Ce-doped Ba($Zr_{0.2}Ti_{0.8}$)$O_3$(BCZT);
- Thin Film;
- MLCC(Multi-layer Ceramic Capacitor)